MEMS (Micro Electro Mechanical Systems)
Summary
MEMS – micro-electro mechanical systems, describes both the category of devices, and the technique for manufacturing them. These tiny devices have elements ranging in size from 1 to 100 microns – about the thickness of a human hair.
MEMS are divided into two categories – sensors and actuators. Sensor devices gather information from their surroundings. Actuators execute given commands, or “act”, generally through highly controlled movements. MEMS are made using the basic fabrication techniques and materials of micro-electronics. Each MEM system consists of both mechanical and electrical components. The electrical elements on the chip process data, and the mechanical elements act in response to that data. Therefore, there is a complete system on a chip.
Keywords: MEMS, micro-mirror, accelerometer, sensor, micro electronics
